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Dupont Kalrez

  1. 17 Jan

    Enhancing Semiconductor Performance with Ultra-Pure Seals

    Enhancing Semiconductor Performance with Ultra-Pure Seals

    The semiconductor industry operates in a highly specialized market, demanding seals that can withstand extreme chemical exposures and temperature variations. These seals play a critical role in preventing contaminants from entering the fluid stream.

    Enhancing Semiconductor Performance with Ultra-Pure Seals

    The primary consideration for selecting seals in semiconductor applications is their operating characteristics. Depending on whether the seal is static or dynamic, the requirements and materials differ significantly.

    Static Seals: Prioritizing Chemical and Thermal Stability

    Static seals, which remain stationary without relative motion, benefit greatly from the use of perfluoroelastomers (FFKM rubber). Among these, DuPont™ Kalrez® stands out for its exceptional chemical and thermal stability.

    IES, a designated distributor of DuPont™ Kalrez®, offers

    Read more »
    January 17, 2025
    Temperature , Dupont Kalrez
  2. 24 Oct

    DuPont™ Kalrez® Seals Help Reduce Particle Generation

    DuPont™ Kalrez® to Help Reduce Particle Generation

    DuPont's Trilobe seals can help improve seal life in dovetail grooves. The improved design combines the excellent chemical, thermal, and plasma resistance of Kalrez®  FFKM parts with a unique cross-sectional shape that eliminates many of the problems associated with semi-dynamic seal applications using a dovetail groove. These problems include shorter seal lifespan, installation difficulties, and increased particle generation due to seal wear and degradation.

    >>> Shop DuPont™ Kalrez®

    So what makes these Kalrez® seals unique?

    • The molded notch makes installation quick and easy, oftentimes significantly reducing the time for installs. Additionally, it elminates improper installation and user error.
    • The geometry of the seal
    Read more »
    October 24, 2024
    Dupont Kalrez
  3. 28 Aug

    DuPont™ Kalrez® 8085 for Semiconductor Processes

    IES Technical Sales is an authorized distributor and manufacturer's rep for DuPont Kalrez. Contact us today for all your FFKM needs.

    DuPont™ Kalrez® 8085 for Semiconductor Processes

    DuPont™ Kalrez® 8085 perfluoroelastomer parts are a beige, general purpose product for “select” etch, ash/strip and deposition processes. It has been formulated for minimal particle generation in NF3 plasma. Kalrez® 8085 exhibits very low particle generation and low weight loss in oxygen and fluorine-based plasmas, has excellent mechanical strength and is well-suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate valves, bonded pendulum valves, gas orifice seals, gas feedthrough seals, chamber lid seals, etc.) A maximum continuous service temperature of 240°C is suggested. Kalrez® 8085 can also withstand short-term excursions to 275 °C. Ultrapure

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    August 28, 2024
    Dupont Kalrez
  4. 5 Jul

    DuPont™ Kalrez® Bonded Door Seals

    DuPont™ Kalrez® Bonded Door Seals

    Bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.

    DuPont™ Kalrez® bonded door seals are designed for easy installation and low particle generation. They combine a custom seal design and proprietary adhesion technology along with the excellent plasma resistance of Kalrez® perfluoroelastomer seal materials developed for semiconductor applications. The seal is held in a “fixed” position versus conventional O-rings, thereby eliminating “rolling/twisting” and abrasion during door actuation. In addition, the seal design has been optimized using finite element analysis (FEA) to minimize high concentrations of localized stresses. As a result, both particle generation

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    July 05, 2024
    Vacuum , Temperature , Dupont Kalrez
  5. 15 May

    Critical Seals in HDPCVD Processes

    Critical Seals in HDPCVD Processes

    Extending Lifetime of Critical Seals in HDPCVD Processes

    The Challenge

    As the semiconductor industry continues to invest in 300 mm wafer fabrication, the spotlight is on process improvement and the greater demands this technology makes on process equipment. In HDPCVD processes elastomer sealing materials can be a weak link because of the need for seal replacement during preventive maintenance (PM) procedures.

    Exhaustive testing of sealing materials on CVD platforms reveals that potential risks of contamination can be reduced and mean time between replacement (MTBR) extended by careful selection of sealing materials. A recent breakthrough in perfluoroelastomer (FFKM) seal technology promises

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    May 15, 2024
    Dupont Kalrez
  6. 3 Apr

    Kalrez® Perfluorelastomers: How to Select the Right Compound

    Selecting the right Kalrez® Compound

    Kalrez® was the first high performance perfluoroelastomer designed for plasma, high temperature, and wet process applications, and was introduced in the 1970s. Many users think of Kalrez® in a similar way we have all come to think of “Kleenex®” – that is – as a generic product and just about any type of Kalrez® will be OK. However, there are now many versions (“compounds”) of Kalrez® based on the intended application, and the differences are substantial.

    The table below is a great starting point,

    Read more »
    April 03, 2024
    Vacuum , Temperature , Thin Film and Plasma , Dupont Kalrez
  7. 6 Feb

    DuPont™ Kalrez® Perfluoroelastomer Parts for Wet Processes

    DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for over 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont offers molded O-Rings and custom seals using a series of specialty products and ultrapure processing for the semiconductor industry. Ultrapure processing is standard for all semiconductor product grades.

    Kalrez® Product Selector for Wet Processes

    Click Read More to see process types, service temps, and more >>>

    Read more »
    February 06, 2024
    Temperature , Dupont Kalrez
  8. 30 Nov

    DuPont™ Kalrez® Perfluoroelastomer Parts for Thermal Processes

    DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont Kalrez® seals are available in standard and custom sized O-rings, as well as customized shapes, that meet the demanding requirements of wafer processing in thermal environments. A proprietary ultraclean process and cleanroom handling is standard for all Kalrez® products utilized in the Semiconductor Industry.

    Kalrez® Product Selector for Thermal Processes

    Process
    Type
    Read more »
    November 30, 2023
    Temperature , Dupont Kalrez
  9. 7 Aug

    Dupont Kalrez® Seals for Semiconductor Processing

    Kalrez O-Rings from IES for Semiconductor Applications

    Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables. Semiconductor Processing Seals

    Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.

    They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. 

    Read more »
    August 07, 2023
    Vacuum , Temperature , Thin Film and Plasma , Dupont Kalrez
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