Rapid Thermal Processing (RTP) and Annealsys Advantages
Annealsys RTP / RTCVD systems are used for many different types of R&D applications to production. The main productions applications are: power devices, sensors, MEMS, optoelectronics, telecommunication devices, discrete components, and laser diodes.
RTP Processes
Resident reactions processes in which heat is applied to modify already existing materials structure in or on the wafer with no additional external materials.
Implant and Ohmic contac annealing
Diffusion of dopants
Densification and crystallization
Thermal annealing of polymers
Surface interaction processes in which heat causes modification of the wafer surface by gases spread over it : Oxidation, nitridation, selenization, silicon carbonization.
Annealsys Process Development Support: R&D and Synergy Center
Annealsys provides process assistance to our customers to optimize the process conditions of their Annealsys RTP and DLI-CVD systems. Our services include:
Annealsys AS-Micro Rapid Thermal Processing System
This economical 3 inch Rapid Thermal Processing System is great for laboratories and educational purposes. It contains a dual chamber to avoid cross contamination issues along with an optional glove box interface.
Applications of the AS-Micro Rapid Thermal Processing System
The AS-Micro can perform various rapid thermal annealing processses at atmospheric pressure or under vacuum:
With more than 300 systems installed in 44 countries, Annealsys is a leading manufacturer of RTP and CVD systems for research and production applications. A number of worldwide famous laboratories and production fabs are using Annealsys machines for the manufacturing and the development of future semiconductor photovoltaic and nanotechnologies components.
The Annealsys RTP furnaces allow performing annealing processes up to 2,642 degrees Fahrenheit (1,450 degrees Celsius) under different types of gases at atmosphere, or under reduced pressure.
Annealsys develops and manufactures direct liquid injection CVD and ALD systems, offering the highest versatility for process development. Their DLI
