Magnetron Sputtering
Magnetron Sputtering
Through experience and extensive technical know-how, IES offers customers a complete sputtering solution. The Gencoa Rectangular and rotatable magnetrons offering a large choice of magnetic options are complemented by the range of ion sources for pre-cleaning, and process tools such as the powerful Speedflo process controller and Optix sensor.
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Models
Circular
For target diameters of 6"-16", IES offers an established design of circular magnetron, suitable for coating larger areas.
Rectangular
IES have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application.
Rotatable
Rotatable System (GRS) family of rotatable magnetrons covers four styles of end-block, with two options of internal flange mount style, and options for horizontal cantilever and vertical mounted rotatables.
