Vacuum Valves
Vacuum Valves
A vacuum valve is a device mounted in a supply or exhaust line of a vacuum system. It is usually used to isolate vacuum areas such as process chambers, or to control incoming and outgoing gas volumes. Vacuum valves can be operated manually, pneumatically, electropneumatically, electrically or electromagnetically.
Valves also help direct the flow the gas and liquid using a variety of types. The most commonly used valves in a vacuum system include gate valves, ball valves, and needle valves.
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Gate Valves
These valves are used in most cases to open and close the vacuum chamber during the deposition process. The body is constructed of 304 stainless steel and its bonnet can either by ordered in viton for high vacuum systems, and copper for ultra high vacuum.
Ball Valves
Ball valves use a metal ball with a hole bored through the center, sandwiched between two seats to control flow.
Needle Valves
Needle valves can also be used in vacuum systems, specifically to release a steady, controlled supply of gas without a great amount of pressure.
Diaphragm Valves
Diaphragm valves are known as non-return valves and one-way valves. They allow flow in one direction but prevent it in the opposite direction. Diaphragm valves are powered by flow and the pressure difference that exists between their inlet and outlet ports.
Gauge Valves
A Gauge Valve is designed for isolating the attached instrument for protection or removal. The added function of the port is to provide connection access for service, calibration, sampling, purging, or a host of other tasks, all of which can be completed while the process remains in operation. Sometimes two of the ports will be plugged and the instrument or gauge connected to the port providing the most convenient or functional orientation of the connected gauge or the valve handle.
Cylinder Valves
Most compressed gas cylinders require the installation of at least one valve. This valve allows the cylinder to contain gases and allows gas to be filled into or emptied from the cylinder.
