Cryogenic Pumps

Cryogenic Vacuum Pumps

The Trillium Closed cycle helium cryogenic systems serve a number of purposes within modern industry, but the primary applications are in temperature control and vacuum. Cryogenic coldheads are used in a number of cooling applications involving electronics and superconducting magnets. With the addition of a vacuum vessel and condensing arrays, a cold head becomes a cryogenic vacuum pump or a cryogenic water vapor pump, commonly known as cryopumps. Cryopumps enable such industries as semiconductor manufacturing, optical coating and environmental test as they can generate environments achieving very low pressures.

 

Trillium

All Your Cryogenic Needs

Whether a cold head or cryopump system, each requires a helium compressor, helium lines, electrical drive cables and a number of accessories in order to function. We offer a  wide range of products and services in this regard, including new and refurbished cryo pumps, cold heads, water vapor pumps, helium compressors and other system components. We also offer expert service and advanced exchange from our Austin repair facility, or if you prefer to perform your own maintenance, we offer a full range of repair kits and spare parts.

Models

CP8 & CP8LP

TheCryo-Plex 8 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 8 can be configured to support a wide range of research and production applications and is an integral component of Trillium’s’ cryogenic high vacuum solutions..

CP10

The Cryo-Plex 10 inlet flange configurations conform to industry standard ANSI, ISO and Conflat® and full UHV specifications, allowing seamless integration into existing process infrastructures and easy exchange with other OEM cryopumps. Choose Cryo-Plex 10 so mission critical processes can consistently perform at peak efficiency with minimum downtime.

CP16

The Cryo-Plex 16 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 16 meets the capacity and performance requirements of many large chamber applications. Single-pump solutions simplify installation and maintenance, improve efficiency and lower total cost of ownership, making Cryo- Plex 16 a preferred solution for box-coating systems, space simulation chambers and electron beam coating systems.