Dry Vacuum Pumps
Dry Vacuum Pumps
Best renowned for its vertical screw pumping technology, with improved energy-saving structure, the Kashiyama SDE series offers unrivaled reliability and productivity in harsh applications. Designed for on board installation, MU series offers powerful pumping performance from small footprint requiring only 400 watts (MU100X) at vacuum. SDL series offers high pumping speed from atmosphere, achieving high throughput for large load lock and FPD applications.Rotary piston vacuum pumps have managed to maintain their popularity in many industries, especially those requiring the evacuation of large manually loaded vacuum chambers. Due to their rugged design and large internal clearances, piston pumps have the unique ability to ingest debris and continue to operate. In addition, their simple design makes it possible for on-site maintenance from valve deck changes to full overhaul.
Applications Using Dry Vacuum Pumps
Dry vacuum pumps can be used across a multitude of applications. At IES we offer a wide variety of models that help support light to harsh process applications as well as general industry dry vacuum needs.
Models
Harsh Duty Process & Large Pumping Performance
The Durable, Long Lasting Dry Vacuum Pump for any Process Application. Large Pumping Capability for Increased Wafer and FPD Substrate Sizes. SDE Series for Harsh Duty Application & SDL series for Lock application.
Light Process Application
The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.
General Industry
Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.
