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Thin Film Deposition

Plasma Power Sources
  1. Advanced Energy Navio
  2. Advanced Energy PEII Series
  3. Advanced Energy Ascent DMS
  4. Advanced Energy Apex
  5. Advanced Energy Pinnacle Plus+
  6. Advanced Energy Pinnacle Series
  7. Advanced Energy Cesar
  8. Advanced Energy Ascent AMS Series
  9. Advanced Energy HiLight
  10. Advanced Energy DC and Pulsed-DC Solvix
  11. Advanced Energy Paramount Plus
Magnetron Sputtering
  1. Gencoa Active Anode
  2. Gencoa GRS-M
  3. Gencoa GRS-V
  4. Gencoa GRS-C
  5. Gencoa GRS-S
  6. Gencoa Rectangular VTFLEX
  7. Gencoa Rectangular XH
  8. Gencoa Compact Cathode
  9. Gencoa Dual Rectangular
  10. Gencoa Single Rectangular
  11. Gencoa Circular Vtech
  12. Gencoa Circular FFE
  13. Gencoa Standard Circular
  14. Gencoa 3G Circular
Inductively Coupled Plasma (ICP) Sources
  1. CCR Technology COPRA Built-In ICP Sources
  2. CCR Technology COPRA Ring ICP Sources
  3. CCR Technology COPRA Linear ICP Sources
  4. CCR Technology COPRA DN160 Round ICP Source
  5. CCR Technology COPRA DN200 Round ICP Sources
  6. CCR Technology COPRA DN250 CF Round ICP Sources
  7. COPRA DN251 ISO-LF (K) Round ICP Sources
  8. CCR Technology COPRA DN401 Round ICP Sources
  9. CCR Technology COPRA DN501 Round ICP Sources
Electron Beam Sources
  1. Telemark 509 Ultra Compact UHV Source
  2. Telemark 528 Compact Linear UHV Source
  3. Telemark 249 Near UHV Multi-Pocket Source
  4. Telemark 575 Linear UHV Source
  5. Telemark 263 Crucible-less Source
  6. Telemark 211 Single Pocket Source
  7. Telemark 285 High Capacity Multi-Pocket Source
  8. Telemark 264 Production Multi-Pocket Source
  9. Telemark 244 R&D Multi-Pocket Source
  10. Telemark 269 Near UHV Multi-Pocket Source
  11. Telemark 578 Linear UHV Source
  12. Telemark 293 Crucible-less Source
  13. Telemark 259HV Single Pocket Source
  14. Telemark 287 High Capacity Multi-Pocket Source
  15. Telemark 266 Production Multi-Pocket Source
  16. Telemark 246 R&D Multi-Pocket Source
  17. Telemark 279 Near UHV Multi-Pocket Source
  18. Telemark 272 Single Pocket Source
  19. Telemark 295 High Capacity Multi-Pocket Source
  20. Telemark 274 Production Multi-Pocket Source
  21. Telemark 224 R&D Multi-Pocket Source
  22. Telemark 299 Near UHV Multi-Pocket Source
  23. Telemark 298 High Capacity Multi-Pocket Source
  24. Telemark 276 Production Multi-Pocket Source
  25. Telemark 294 Production Multi-Pocket Source
  26. Telemark 296 Production Multi-Pocket Source
Ion Beam Sources
  1. Telemark Ion Current Monitor
  2. Telemark Mini UHV Ion Source
  3. Telemark 750 Ion Source
  4. Telemark 1250 Ion Source
  5. Telemark 2000/3000 Ion Sources
Cryochillers
  1. Telemark Cryochillers
Rapid Thermal Processing and Direct Liquid Injection Deposition Systems
  1. Annealsys Zenith-150
  2. Annealsys AS-Master
  3. Annealsys AS-Premium 
  4. Annealsys AS-One 
  5. Annealsys AS-Micro
  6. Annealsys Jipelec JetLight
  7. Annealsys MC-100 Direct Liquid Injection Deposition System
  8. Annealsys MC-050 All in one DLI system
Surface Preparation
  1. PVA TePla Ion 40 Plasma System
  2. PVA TePla IoN 100 Plasma System
  3. PVA TePla PlasmaPen™ Atmospheric Plasma System
  4. PVA TePla Ion Wave 10 Gas Plasma System
  5. PVA TePla Robo Pen System
Vacuum Wafer Handling
  1. Adenso Wafer Handling Robot
  2. FLP FOUP300 VAC.LOADPORT
  3. adHEAT
  4. adVAC
  5. adJET
  6. AAM AutoAlign.Module
  7. STEALTH.CARRIER
  8. WFM WaferFlip.Module
  9. adLOAD advanced High.Capacity LoadLock.Modules
  10. Implanter.Module
  11. WXM WaferExchange.Module
  12. ALM AutoLoad.Modules
  13. SSS.SubstrateScanner
  14. EEX EndeffectorExchange.Module
  15. MLL ManualLoadLock.Modules