Telemark Mini UHV Ion Source
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The Mini UHV 500W Gridless End-Hall Ion Source has been specially developed to provide a cost effective solution for ion assisted processes for small to medium sized UHV deposition systems. The source provides an extremely reliable and maintenance-free 500W source for many applications in PVD processes. The compact design and rugged construction allows easy installation to both new and existing UHV vacuum deposition systems.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Source Diameter:47mm diameter by 70mm long (1.86” x 2.74”)
- Source Weight:1.4 kgs (approx. 3 lbs)
- Beam Power: Anode volts selectable to 225 volts; anode power 500W
- Anode Current: Maximum 5 amps under manual or automatic beam control
- Beam Divergence: Wide beam divergence in excess of 80 degrees
- Gas Flow: Approximately 7sccm argon required to produce 2 amps (typical)
- Cooling Water: Minimum 2.3 liters/minute. Water flow is constantly monitored
- Power Unit Dimensions: 135mm x 480mm x 406mm
- Power Unit Weight: 28 kgs (60lbs)
- Technical Sheets