Maintaining a cluster tool can be difficult. As an example take an 8 port configuration with 7 process modules and a loadlock. In more cases is most definitely a challenge.
Why is that?
The reasons are usually as follows:
A desire to make maximum use of the floor space
The need for fixed piping for the process gasses
The use of a rigid mainframe without adequate service access
What can be done about it?
Process technology is clearly the top priority. Substrate handling is of secondary importance. This line of reasoning already dictates the solution: Using a flexible, central robot Wafer Handling Module that allows access for maintenance work simply by removing a loadlock module – without having to disconnect the media connections.
Sounds fantastic? It is. And it gets even better:
Using a semi-automatic docking solution called adDOCK makes it very easy to uncouple and move
Hiden Analytical mass spectrometry systems support nuclear fusion research across the entire fuel cycle, helping scientists better understand the complex interactions that drive fusion performance. From fuel handling and vacuum system characterization to plasma diagnostics and materials analysis, our instruments deliver the precise data needed to advance fusion technologies and improve reactor efficiency.
Our solutions provide real-time hydrogen isotope monitoring and residual gas analysis, enabling researchers to track changes in operating conditions and identify critical process variables. Species-resolved plasma diagnostics offer deeper insight into plasma behavior, while advanced analytical techniques help characterize the chemistry and physics occurring within fusion environments.
Beyond plasma studies, Hiden Analytical systems support investigations of plasma-facing materials through Secondary Ion Mass Spectrometry (SIMS)
Bruker Extends Optical Profiler Summer Savings Through October 31
If you've been considering expanding your surface metrology capabilities, there's still time to take advantage of Bruker's Optical Profiler Summer Savings promotion. The offer has been extended through
Applied Thermal Control’s Airblast Coolers are an efficient solution for effectively managing the temperature of process fluids in various industries, utilising ambient air to dissipate unwanted heat. The A-Series, encompassing a range from small to large units, caters to diverse cooling needs, offering both standard and customised designs. These coolers are known for their energy efficiency, robust performance, and adaptability to different applications, backed by ATC’s extensive engineering expertise. With a focus on sustainability and operational excellence, Applied Thermal Control’s Airblast Coolers ensure optimal thermal management, supported by a global network of service agents.
A-Series Airblast Coolers
ATC A-Series Airblast Coolers are now classified as Non-Standard products and are no longer included within our standard offering.
Airblast coolers use ambient air to remove heat from process fluids, providing an efficient alternative
The placement of the sensor, in relationship to the workload and heat source, can compensate for various types of energy demands from the workload. Sensor placement can limit the effects of thermal lags in the heat transfer process. The controller can only respond to the temperature changes it “sees” through feedback from the sensor location. Therefore, sensor placement will influence the ability of the controller to regulate the temperature for a desired set point.
Be aware that sensor placement cannot compensate for inefficiencies in the system caused by long delays in thermal transfer. It is also important to realize that inside most thermal systems, temperature will vary from point-to-point. For this reason it may be advantageous to utilize more than one sensor - one to maintain the desired application set point
Quickly Replace Pirani Vacuum Gauges with the Teledyne Hastings HVG-PR
For OEM engineers, maintenance technicians, and vacuum system integrators, replacing a Pirani vacuum gauge can seem overwhelming. Different manufacturers use different analog output scaling methods, input power requirements, unique connectors, and proprietary wiring schemes. This can turn what could be a simple replacement into a time-consuming engineering project.
The Teledyne Hastings Instruments HVG-PR Pirani Vacuum Gauge was designed specifically to address these challenges. With two possible analog output curves, an industry-friendly RJ45 connection with standardized power / analog signal pinouts, and a compact size, the HVG-PR makes gauge replacement faster, easier, and more cost-effective than traditional alternatives.
Does My New Gauge Have the Correct Analog Output Signal?
A common issue encountered during vacuum gauge replacement is analog output incompatibility.
Gencoa develops innovative thin-film materials and coatings using magnetron sputtering and other PVD technologies, delivering responsive support for everything from simple coating requirements to complex multi-stage coating development projects.
Gencoa's expertise spans sectors including decorative coatings, semiconductors, tooling, automotive, electronics, and optical coatings, alongside advanced functional surface technologies such as biocidal coatings, barrier coatings, and tailored surface wettability, with all coating work conducted from a well-equipped coating development facility.
Theyspecialise in coating solutions for applications in harsh environments across aerospace, defence and security, nuclear fission and fusion, and energy storage, where durability, reliability, and resistance to wear, corrosion, and extreme temperatures are critical to long-term material performance.
Maintaining Accuracy with Teledyne Thermocouple Vacuum Gauges
Teledyne thermocouple-based vacuum gauges are calibrated for use with their standard cable lengths. When an application requires a longer cable or an extension cable, however, there is an important step that can help ensure the instrument continues to perform as intended.
Increasing cable length can affect the electrical characteristics of the gauge circuit and may change the heater current at the sensor. If that current shifts, the accuracy of the vacuum reading can be affected.
For this reason, Teledyne recommends verifying the heater current whenever longer cables or extension cables are used. If necessary, the heater current should be adjusted using the appropriate Teledyne reference tube.
Make sure to use the correct reference tube for your Teledyne instrument:
