In the realm of semiconductor manufacturing, where precision and control are paramount, RF impedance matching networks play a critical role. These networks act as a bridge between the plasma source and the process chamber, optimizing power transfer and ensuring stable and efficient semiconductor processes.
This blog delves into the concept of impedance matching networks and explores their significance in semiconductor manufacturing. It demystifies the underlying principles, discusses key components and their limitations, and sheds light on how they contribute to maximizing the performance and reliability of semiconductor processes.
Impedance Matching Basics
Impedance is a measure of the opposition to the flow and to changes in alternating current (AC). It consists of two components: resistance (R) to measure the opposition to a flow of current and (X), reactance, to measure the opposition to a change in current due to the existence of an inductive or
Kalrez® was the first high performance perfluoroelastomer designed for plasma, high temperature, and wet process applications, and was introduced in the 1970s. Many users think of Kalrez® in a similar way we have all come to think of “Kleenex®” – that is – as a generic product and just about any type of Kalrez® will be OK. However, there are now many versions (“compounds”) of Kalrez® based on the intended application, and the differences are substantial.
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Watlow’s customers will be impressed with the speed and ease of specifying, selecting, pricing, ordering and delivery. WATCONNECT panels are flexible and scalable; there are thousands of configurable, pre-engineered panel solutions available.
Case Study - Laboratory Instrumentation for Atomic Level Deposition (ALD)
Application and Industry
Laboratory Instrumentation for a revolutionary Atomic Level Deposition, (ALD) process that is now being adopted for mainstream nanotechnology semiconductor industry.
Challenges
Two founders from Harvard approached Innovent about manufacturing prototype tools to demonstrate proof-of-concept of a revolutionary ALD process for the semiconductor industry. They were in search of a business partner who had the capability to take their proof-of-concept laboratory tool and turn it into a reproducible and reliable electromechanical manufactured product.
Solutions
Once a business plan was agreed on, Innovent engineers set to work driving a DFM project using only
The Importance of Specifying Gas Flow Range on a Mass Flow Controller
The Full Scale (FS) Range and Gas on a Mass Flow Controller (MFC) directly correlates to the transmitted output (analog or digital) of the device. In an analog device, the maximum output value (such as 5 vdc or 20 mA) will be equivalent to the FS value. The accuracy of most MFCs is a function of this FS Range.
Emmissivity Compensation and the Importance of Pyrometers
If you are measuring the temperature of a static surface, whether or not its temperature is changing, all is good. But what happens when you are changing the surface and its emissivity is also changing? Your pyrometer inaccuracy can increase substantially.
Many customers continue to rely on oil-sealed rotary vane pumps for many applications. They often struggle with issues related to vacuum oil, including oil leaks, dealing with used oil after oil changes, and oil back-streaming issues that impact their production process. Our partners at Trillium offer some low cost dry pump upgrades that are perfect for customers who want to eliminate the problems mentioned above but don’t want to spend $15-$30K for a new dry pumping system. If you would be interested in upgrading, and you have 3 phase power and process cooling water available at your facility, please reach out to IES for more information.
Problem
Oil back-steaming
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Noise
Solution
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Magnetron sputtering is a form of deposition technology that employs a gaseous plasma and kinetic energy to create a flux of ‘sputtered’ material used to coat surfaces under vacuum. The high-energy ions present in a magnetron sputtering plasma bombard the surface of the target (source material) and liberated atoms by the sputtering process to create this vapour cloud. The vapour moves through the vacuum area, depositing onto a substrate surface to create a thin film covering.
Standard Sputtering Processes
Standard sputter deposition processes (non-magnetically enhanced) involve a chamber evacuated to a high vacuum to decrease the partial pressure of background gases. Once the base pressure has been attained, a sputtering gas such as argon is introduced into the chamber and a pressure control system is employed to regulate the total pressure. [1]
A high negative voltage (-0.5 to -3 kV) is applied to the cathode
Applied Thermal Control (ATC) Recirculating Chillers and Mass Spectrometry
Recirculating chillers are commonly used in mass spectrometry laboratories to provide precise and stable cooling for various components of the mass spectrometer. These chillers offer a continuous flow of temperature-controlled heat transfer fluid, typically water or a water-glycol mixture, to remove heat generated by the instrument.
It is worth noting that the specific configuration and requirements of recirculating chillers can vary depending on the mass spectrometer model, laboratory setup, and cooling needs. Manufacturers of mass spectrometry instruments often provide recommendations and compatible options for recirculating chillers to ensure optimal cooling for their systems.
Using recirculating chillers in mass spectrometry offers several advantages:
DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for over 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont offers molded O-Rings and custom seals using a series of specialty products and ultrapure processing for the semiconductor industry. Ultrapure processing is standard for all semiconductor product grades.
Kalrez® Product Selector for Wet Processes
Click Read More to see process types, service temps, and more >>>
