Substrates are getting thinner and thinner – and customer + process requirements are increasing rapidly. Be prepared with Adenso’s UTH solutions – UltraThin wafer/substrate Handling, based on the VAC.ROBOTICS platform, which allows you to use all the familiar features (ATM+VAC):
UltraThin substrate allows you to use all the familiar features:
Achieving Temperature Uniformity in Gas Line Heating Systems for Semiconductor Manufacturing
Semiconductor tools with gas lines, forelines and exhaust lines require precise heating and thermal process control. Traditional systems are complex and cumbersome and often fail to offer sufficient thermal data and heating control. Without optimal thermal performance, line shutdowns are inevitable and costly.
Watlow's STREAMLINE™ heating system with Adaptive Thermal Systems® (ATS™) technology creates a centralized thermal system with improved temperature uniformity, reduced footprint, extensive diagnostics and faster development times.
Most people are aware that the HVG-2020B wide range vacuum gauge has an optional display, but not everyone realizes that it's much more than just a display. It's actually a color touchscreen display and is packed with features. Let's take a look.
The HVG-2020B has 5 different display modes. Simply touch the icon on the lower left side to toggle through each one.