The Adenso WHM Wafer Handling Module

The WHM WaferHandling Module, developed by Adenso, features a central vacuum chamber and an integrated WHR WaferHandling Robot, optimized for handling substrates/carriers in high vacuum. Our WHM WaferHandling Module operates completely autonomously, is space-saving, and can be easily docked to your existing process stations – your vacuum cluster system is ready to use!

 

WHR WaferHandling.Robot – the basis for handling and automation

The WHR wafer handling robot is the core of Adenso's modular VAC.ROBOTICS platform. The Adenso WHR handles sensitive and large-area substrates in the field of vacuum robotics (industrial vacbot) and is optimized for maximum payload and long reach. Its simple arm geometry allows for small gate valves and compact handling swivel ranges.

 

Your advantages at a glance:

  • REACH: Largest travel distances – maximum flexibility
  • LOAD CAPACITY: Maximum load capacity – unlimited
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