The Adenso WHM Wafer Handling Module
The WHM WaferHandling Module, developed by Adenso, features a central vacuum chamber and an integrated WHR WaferHandling Robot, optimized for handling substrates/carriers in high vacuum. Our WHM WaferHandling Module operates completely autonomously, is space-saving, and can be easily docked to your existing process stations – your vacuum cluster system is ready to use!
WHR WaferHandling.Robot – the basis for handling and automation
The WHR wafer handling robot is the core of Adenso's modular VAC.ROBOTICS platform. The Adenso WHR handles sensitive and large-area substrates in the field of vacuum robotics (industrial vacbot) and is optimized for maximum payload and long reach. Its simple arm geometry allows for small gate valves and compact handling swivel ranges.
Your advantages at a glance:
- REACH: Largest travel distances – maximum flexibility
- LOAD CAPACITY: Maximum load capacity – unlimited substrate selection
- GATE VALVE: Intelligent kinematics – smallest gate valves
- FOOTPRINT: Space-saving kinematics – small installation space
- COMPLEXITY: Keep it simple with Adenso – Save space and money!
The WHR WaferHandling.Robot is designed to meet the trend towards thinner substrates with larger dimensions and rectangular geometries, as is increasingly demanded by our customers in the fields of OLED and quantum computing. Adenso offers specially adapted configurations that are compatible with all known options of the VAC.ROBOTICS platform.
Find more information on the WHM Wafer Handling Module here, or reach out to IES for guidance on finding the right product for your application.