adLOAD advanced High.Capacity LoadLock.Modules
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The Adenso adLOAD LoadLock.Modules offer an enormously high substrate capacity for cluster tools. 30, 40, 50 and more wafers per cycle can be accommodated in a LoadLock – an enormous increase in the autonomous time with the same footprint.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Compatible with all options of the Adenso VAC.ROBOTICS platform
- Combinable with alignment, multisubstrate gripper, temperature control, etc.
- Also configurable with a substrate size of 200 and 300 mm
- Combination with all central platforms for future-proof flexibility of all applications