Trillium CP16 CryoPlex Pump
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The Cryo-Plex 16 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 16 meets the capacity and performance requirements of many large chamber applications. Single-pump solutions simplify installation and maintenance, improve efficiency and lower total cost of ownership, making Cryo- Plex 16 a preferred solution for box-coating systems, space simulation chambers and electron beam coating systems.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Height (In): 23.6
- Argon Throughput: 500 scc/min
- Argon Capacity: 2000
- Argon Pumping Speed: 4200
- Hydrogen Capacity: 15 standard liters @ 5x10e-6
- Technical Sheets
PART NUMBER | Flange Style | Pump Component | Air Pumping Speed | Water Pumping Speed | Hydrogen Pumping Speed | Inlet Flange | REQUEST FOR QUOTE |
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