Annealsys Rapid Thermal Processing and Chemical Vapor Deposition Machines


IES is a partner of Annealsys, proudly representing them as experts in the RTP and CVD industry.

Contact IES for RTP and CVD systems.

With more than 300 systems installed in 44 countries, Annealsys is a leading manufacturer of RTP and CVD systems for research and production applications. A number of worldwide famous laboratories and production fabs are using Annealsys machines for the manufacturing and the development of future semiconductor photovoltaic and nanotechnologies components.

The Annealsys RTP furnaces allow performing annealing processes up to 2,642 degrees Fahrenheit (1,450 degrees Celsius) under different types of gases at atmosphere, or under reduced pressure.

Annealsys develops and manufactures direct liquid injection CVD and ALD systems, offering the highest versatility for process development. Their DLI and CVD systems can handle the widest range of chemical precursors. Annealsys research and development department provides services for RTP, CVD, and ALD process development and demonstration.

Preparing the future, Annealsys scientists are involved in collaborative research projects. Annealsys can be more than your supplier; with IES and Annealsys, we can become your long-term partner. Annealsys' extensive process expertise is brought to customers so that they can shorten their developments. Their engineers are working to offer enhanced system capabilities for a perfect control of customers’ processes.

Annealsys machines are well known for their high quality and high reliability. They ensure low cost of ownership and optimum uptime. For production applications, automatic robot loading systems with SECS/GEM interface are integrated to ensure high throughput as well as host communication. The full quality testing of Annealsys machines and the safety certifications are a guarantee of reliable and safe tools for customers.

Their philosophy involves building a long-term relationship with customers. To achieve this, they have created a worldwide network with trained engineers for sales and service, including the experts at IES Technical Sales.

Annealsys has a large inventory of critical spare parts available for same day shipments. With their software remote diagnostic features, they offer outstanding customer support and service all around the world.

CVD and RTP from Annealsys: