DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for over 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont offers molded O-Rings and custom seals using a series of specialty products and ultrapure processing for the semiconductor industry. Ultrapure processing is standard for all semiconductor product grades.
Kalrez® Product Selector for Wet Processes
| Process Type | Maximum Service Temperature | Typical Chemistries | Suggested Products |
| Wafer Preparation | 158°F to 257°F | UPW2, Piranha, SC-1 and SC-23, O3, HF (49%), EKC® fluids | Kalrez® W240UP |
| Etching | 158°F to 203°F | HNO3, HF, H2O, H3PO4, UPDI, NH4OH | |
| Stripping | 194°F to 257°F | NMP/Alkanolamine, hydroxylamine, acetone, IPA, DMSO, Furanone, EKC® 265™ | |
| Copper Plating | 176°F to 212°F | CuSO4 Solution, H2SO4 |
Types of Applications for Wet Processes
- Door/lid seals
- Drain seals
- Seals for chemical containers
- Fittings
- Seals for filters/connectors
- Flow meters
- Flow controllers
- Valves
Current Kalrez Products for Thermal Processes
Kalrez® W240UP
Kalrez® W240UP perfluoroelastomer parts are a black product for high volume O-rings and custom parts for filters, valves, pumps and other wet manufacturing processes requiring a wide range of chemical resistance. Kalrez® W240UP provides an excellent combination of properties (resistance to acids/bases) and is the product of choice for wet processes as an upgrade from standard elastomers, i.e. FKM, EPDM, etc.
Thanks to Ultrapure clean process, Kalrez® W240UP perfluoroelastomer parts exhibit very low particle generation.
Kalrez® W240UP Chemical Resistance
| Immersion Chemistry | Temperature | Volume Change (%) after 672 hours immersion1 |
| HCl (3.5%) | 73°F | < 0.1 |
| HF (49%) | 73°F | 2.3 |
| HNO3 (70%) | 73°F | 0.6 |
| PGMEA (> 99.5%) | 73°F | 0.1 |
| NH4OH (29%) | 73°F | < 0.1 |
| Methoxy-Methylbutyl Acetate (>98 %) | 73°F | < 0.1 |
| H2SO4 (98%) | 194°F | 0.6 |
| IPA (99.9 %) | 176°F | 2.4 |
| H3PO4 (85%) | 176°F | < 0.1 |
Kalrez® W240UP vs Typical FKM and Competitive FFKM
