Enhancing Semiconductor Performance with Ultra-Pure Seals
The semiconductor industry operates in a highly specialized market, demanding seals that can withstand extreme chemical exposures and temperature variations. These seals play a critical role in preventing contaminants from entering the fluid stream.
Enhancing Semiconductor Performance with Ultra-Pure Seals
The primary consideration for selecting seals in semiconductor applications is their operating characteristics. Depending on whether the seal is static or dynamic, the requirements and materials differ significantly.
Static Seals: Prioritizing Chemical and Thermal Stability
Static seals, which remain stationary without relative motion, benefit greatly from the use of perfluoroelastomers (FFKM rubber). Among these, DuPont™ Kalrez® stands out for its exceptional chemical and thermal stability.
IES, a designated distributor of DuPont™ Kalrez®, offers molded O-rings and custom seals specifically formulated to meet the stringent demands of wafer processing environments. Ultrapure processing is standard for all Kalrez semiconductor product grades and is mandatory for options like Kalrez 6375UP and 7075UP. These ultrapure formulations ensure optimal performance in highly sensitive semiconductor processes.
Dynamic Seals: Addressing Wear, Friction, and Motion
Dynamic seals, which accommodate motion such as reciprocating, oscillatory, or rotary actions, require materials that balance durability and friction reduction. IES' partner, Gallagher Fluid Seals, specializes in designing and manufacturing spring- and rubber-energized seals using advanced materials like Polytetrafluoroethylene (PTFE) and Ultra High Molecular Weight Polyethylene (UHMWPE).
PTFE is particularly valued for its near-universal chemical inertness. To enhance its functionality, dynamic seals often incorporate metal springs made from robust materials like 300-series spring steel. Rubber-energized seals may also utilize perfluoroelastomers, such as Kalrez, to deliver superior chemical and thermal compatibility.
These advanced polymers not only facilitate smooth dynamic motion without causing abrasion but also minimize friction and heat generation. Additionally, their ability to resist contamination ensures the integrity of the fluid stream. Dynamic seals can be customized into virtually any profile, enabling precise solutions for complex applications.
Advanced Design Solutions for High-Pressure and Vacuum Environments
When applications involve extreme pressures exceeding the mechanical limits of standard polymers, Gallagher's engineers specialize in designing solutions using backup ring combinations capable of handling pressures over 100,000 PSI. For vacuum environments, typical sealing systems are designed in a way to maintain functionality even under extreme vacuum conditions. This is achieved through a specialized super-finish process for polymers, paired with precise hardware and mating surface finishes.
Enclosure Seals: Protecting Electronic Components
In boundary sealing applications, solutions are developed to protect electronic enclosures by preventing external contaminants from entering and internal fluids from escaping. These seals are designed for severe environments, such as glove boxes or electronic enclosures, ensuring optimal performance in demanding conditions.
Materials for Long-Term Reliability
When dealing with harsh chemicals and wide temperature ranges—from -400°F to over 500°F—polymers like PTFE and elastomeric materials such as FFKM (Kalrez) provide durable, long-term solutions. Their superior performance minimizes equipment downtime and reduces preventive maintenance cycles, ultimately boosting operational efficiency and profitability.
These advanced materials and innovative designs allow IES to deliver reliable sealing solutions that enhance the performance and longevity of semiconductor equipment.
The original article can be found on Eclipse's website here.
IES and Gallagher Fluid Seals partner with Eclipse Engineering. For a quote or to start a project on Kalrez, contact us today.