Selecting the right Kalrez® Compound

Kalrez® was the first high performance perfluoroelastomer designed for plasma, high temperature, and wet process applications, and was introduced in the 1970s. Many users think of Kalrez® in a similar way we have all come to think of “Kleenex®” – that is – as a generic product and just about any type of Kalrez® will be OK. However, there are now many versions (“compounds”) of Kalrez® based on the intended application, and the differences are substantial.

The table below is a great starting point, focusing on semiconductor applications. Keep in mind, though, that because perfluoelastomers are considerably more expensive than standard fluoroelastomers such as Viton®, and different compounds are priced at different levels, you should try to find the most acceptable compound for your specific application. In some situations, after internal testing, you may be able to find acceptable alternatives at lower price points, or you may discover that only specific compounds truly work in your application

ApplicationFirst Recommendation
Alternate Recommendation(s)
Plasma: PE-CVD, PE-ALD, HDC-CVDKalrez® 9100
Kalrez® 9300, 9500, or 9600
Plasma: SA-CVD, F-CVDKalrez® 9500
Kalrez® 9300, or 9600
Plasma: Ash, StripKalrez® 8002
Kalrez® 9300, 9500, or 9600
Plasma: Conductor EtchKalrez® 9100
Kalrez® 8575, 9300, 9500, or 9600
Plasma: Dielectric EtchKalrez® 9300
Kalrez® 5700, 9300, 9500, or 9600
Thermal: Oxidation, Diffusion, ALD, LP-CVDKalrez® 8900
Kalrez® 7075UP
Thermal: Metal CVDKalrez® 7075UP
Kalrez® 8900
Thermal: Lamp Annealing, RTPKalrez® 8575
Wet ProcessesKalrez® 6375UP

IES Technical Sales is a manufacturer's representative and distributor of DuPont Kalrez. For more information, you can shop on our website or contact us today.