Selecting the right Kalrez® Compound
Kalrez® was the first high performance perfluoroelastomer designed for plasma, high temperature, and wet process applications, and was introduced in the 1970s. Many users think of Kalrez® in a similar way we have all come to think of “Kleenex®” – that is – as a generic product and just about any type of Kalrez® will be OK. However, there are now many versions (“compounds”) of Kalrez® based on the intended application, and the differences are substantial.
The table below is a great starting point, focusing on semiconductor applications. Keep in mind, though, that because perfluoelastomers are considerably more expensive than standard fluoroelastomers such as Viton®, and different compounds are priced at different levels, you should try to find the most acceptable compound for your specific application. In some situations, after internal testing, you may be able to find acceptable alternatives at lower price points, or you may discover that only specific compounds truly work in your application
| Application | First Recommendation Alternate Recommendation(s) |
| Plasma: PE-CVD, PE-ALD, HDC-CVD | Kalrez® 9100 Kalrez® 9300, 9500, or 9600 |
| Plasma: SA-CVD, F-CVD | Kalrez® 9500 Kalrez® 9300, or 9600 |
| Plasma: Ash, Strip | Kalrez® 8002 Kalrez® 9300, 9500, or 9600 |
| Plasma: Conductor Etch | Kalrez® 9100 Kalrez® 8575, 9300, 9500, or 9600 |
| Plasma: Dielectric Etch | Kalrez® 9300 Kalrez® 5700, 9300, 9500, or 9600 |
| Thermal: Oxidation, Diffusion, ALD, LP-CVD | Kalrez® 8900 Kalrez® 7075UP |
| Thermal: Metal CVD | Kalrez® 7075UP Kalrez® 8900 |
| Thermal: Lamp Annealing, RTP | Kalrez® 8575 |
| Wet Processes | Kalrez® 6375UP |
IES Technical Sales is a manufacturer's representative and distributor of DuPont Kalrez. For more information, you can shop on our website or contact us today.

