DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont Kalrez® seals are available in standard and custom sized O-rings, as well as customized shapes, that meet the demanding requirements of wafer processing in thermal environments. A proprietary ultraclean process and cleanroom handling is standard for all Kalrez® products utilized in the Semiconductor Industry.
Kalrez® Product Selector for Thermal Processes
| Process Type | Maximum Service Temperature | Typical Chemistries | Suggested Products |
| ALD / LPCVD / Metal CVD | 482°F to 572°F | WF6 , TiCl4, SiH4, HF, F2 , Cl2 , O2 , H2 O Vapor, ClF3 | Kalrez® 8900/7075UP |
| Oxidation / Nitridation / Diffusion | 536°F to 572°F | N2 , O2 , H2 O Vapor, HCl, Cl2 , O3 | Kalrez® 7075UP/8900 |
| Lamp Anneal /RTP | 482°F to 527°F | Infrared light, O2 , H2 O vapor | Kalrez® 8575 |
| Wafer surface preparation | 392°F to 527°F | NF3 , NH3 , HF, F2 , H2 | Kalrez® 9500/9600 |
Types of Applications for Thermal Processes
- Quartz chamber seal
- Fittings
- Center ring
- Low dielectric curing processes
Current Kalrez Products for Thermal Processes
Kalrez® 8900
Kalrez® 8900 parts are for oxidation, diffusion, ALD, and LPCVD applications. It offers outstanding thermal stability, very low outgassing and excellent (low) compression set properties. Kalrez® 8900 parts exhibit excellent retention of physical properties at elevated temperatures, have excellent mechanical strength and are well-suited for both static and dynamic sealing applications.
Kalrez® 8575
Kalrez® 8575 parts are developed for oxidation, diffusion, lamp anneal and RTP sealing applications. Kalrez® 8575 exhibits excellent thermal stability and long-term sealing performance, less Infrared (IR) absorption and significantly reduced outgassing properties at elevated temperatures. It also has good mechanical properties and is well-suited for both static and low stress/low sealing force applications.
Kalrez® 7075UP
Kalrez® 7075UP parts are targeted specifically metal CVD applications. They offer outstanding thermal stability, very low outgassing and excellent compression set properties. Kalrez® 7075UP exhibits excellent seal force retention, has good mechanical properties and is well suited for both static and dynamic sealing applications. Ultrapure post-cleaning and packaging is standard for all parts made from Kalrez® 7075UP.
Kalrez® 9500
Kalrez® 9500 parts are targeted specifically for deposition processes where ozone, ammonia and water vapor are used for processing, e.g. SACVD, FCVD, PECVD curing processes, etc. It has been specifically designed for use in applications where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. Kalrez® 9500 also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications.
Kalrez® 9600
Kalrez® 9600 parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals. It has an extremely low erosion rate and weight loss from plasma attack and provides excellent chemical resistance to Ammonia, Ozone, and Water Vapor. Its outstanding resilience in compression and ultra-low outgassing at high temperature conditions makes it especially suitable for applications where purity is paramount, such as PlasmaEnhanced Atomic Layer Deposition and Chemical Vapor Deposition processes
Kalrez® Typical Product Positioning
DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont Kalrez® seals are available in standard and custom sized O-rings, as well as customized shapes, that meet the demanding requirements of wafer processing in thermal environments. A proprietary ultraclean process and cleanroom handling is standard for all Kalrez® products utilized in the Semiconductor Industry.
Kalrez® Product Selector for Thermal Processes
| Kalrez® Grade | Color | Hardness Shore A | Maximum Service Temperature (F) | Compression Set at 70 hours (400 F) |
| 8705 | Black | 77 | 621 | 15 |
| 8900 | Black | 76 | 617 | 20 |
| 8575 | White | 63 | 572 | 25 |
| 9500 | Tan | 76 | 590 | 18 |
| 9600 | Olive Green | 70 | 599 | 12 |