Customers who wish to control three phase heaters require power controllers. How do you decide which method of control to select? ‘Two-leg versus three-leg control’ and ‘zero cross versus phase-angle control need to be considered.’ The following will help you decide when each method is appropriate.
Switching all three legs of a heater load is only necessary for the following:
Grounded ‘Y’ heater: Each phase controls to neutral. Grounded heaters have 4 wires attached. The center of the ‘Y’ heater is connected to the neutral
Typically, the manufacturer of your processing system will know how much heat is needed to be removed from the relevant location in order to operate safely and efficiently. If you need to size a recirculating chiller for a new application, here are some suggestions:
Terminology:
Watts = [(ΔT)°F x K] / S Where:
ΔT = Temperature variance between incoming and outgoing water temperature of the instrument. (It is recommended to use the same sensing device for both measurements).
K = Specific heat x density of the circulating fluid. (Water – Use 2,326
RF Plasma Power Delivery System from Advanced Energy
“No strings attached performance” in RF plasma power for semiconductor manufacturing? At Advanced Energy (AE), they like to say, “no cables attached performance.” That was just one of the five daunting challenges they solved when designing their unique genre-breaking RF plasma power delivery system:
No cables from RF generator-to-match and match-to-process chamber electrode
Ultra-fast RF tuning for very short process steps
Wide impedance operating range
A compact single package to fit in small spaces (enabling direct connection to chamber)
Less expensive than traditional RF generator + matching network + connectors + cables
Paramount® HFi™ from Advanced Energy
Advanced Energy pioneered the first commercially viable, fully integrated RF generator and solid-state matching network system in the year 2000 … and it’s been a massive success. Since then, they've
DuPont™ Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years. Kalrez® parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments. DuPont Kalrez® seals are available in standard and custom sized O-rings, as well as customized shapes, that meet the demanding requirements of wafer processing in thermal environments. A proprietary ultraclean process and cleanroom handling is standard for all Kalrez® products utilized in the Semiconductor Industry.
Rotary Piston Vacuum Pumps are legendary for their ruggedness and reliability, thanks to their slow rotational speed and robust, but simple design. Invented in the early 20th century, these type of pumps are still in use today and are popular in metallurgy, space simulation and vacuum drying applications. Trillium US Inc. manufactures the Univac line of Piston Pumps, which are based on the tried and true Stokes H-10/11 series pumps. As a bolt-for-bolt drop in replacement for the Stokes 412, 212 and 148, the Univac 400, 200 and 100 are a competitive alternative with much shorter lead times.
The Trillium Rotary piston vacuum pumps have managed to maintain their popularity in many industries, especially those requiring the evacuation of large manually loaded vacuum chambers. Due to their rugged design and large internal clearances, piston pumps have the unique ability to ingest debris and continue to operate. In addition, their simple design makes it possible for on-site maintenance
Perfect your reactive processes with Speedflo, an advanced reactive feedback control system delivering improvements to deposition rates, coating properties and process reliability. Speedflo is designed around the demands of real processes and has been proven on hundreds of different industrial plasma-based deposition machines – each with varying demands.
With two options available – offering a choice of 8 channels for Speedflo, or 3 channels for Speedflo Mini – Speedflo has the flexibility to benefit a wide range of reactive processes, from magnetron
Covalent Organic Frameworks (COFs) have been making waves in the world of material science and gas separation research. These porous crystalline materials, assembled from organic building blocks, hold promise in applications ranging from carbon capture to fuel purification. To truly unlock the potential of COFs, we need advanced techniques that can provide instantaneous and precise feedback on their performance. Enter the Hiden HPR-40 DSA (Dissolved Species Analyzer) system with a twist — the regular HPR-40 membrane inlet gets a swap, making it an ideal tool for COF characterization. Let’s dive deeper into how this system can revolutionize COF research.
A vacuum exists when there is negative pressure, or when there is system pressure that is less than atmospheric pressure. Manufacturing processes generate different levels of vacuum when operating at peak efficiency for a given vacuum application that are measured using a vacuum gauge. Absolute vacuum is the absence of all matter. Atmospheric pressure, also known as barometric pressure, is the pressure due to earth’s atmosphere. Atmospheric pressure is 760 Torr or 14.696 psia at sea level and changes with altitude. The vacuum pressure scale is book-ended by absolute vacuum pressure in the “ultra-high” vacuum range and atmospheric pressure at the “rough” vacuum range. It should be noted that absolute vacuum, or perfect vacuum, is never truly attained.
Most users know that vacuum is commonly measured using units of pressure. There are a few different systems of pressure measurement, and this blog will discuss those most used. In Armand Berman’s book,
The Applied Thermal Control (ATC) K4 cooler is a powerful laboratory chiller with precision cooling performance. It is built to order to customers’ requirements and designed for use with applications in laboratory and industrial manufacturing processes. ATC manufactures a ariety of chillers from 480W through to 15kW cooling capacity.
The K4 chiller offers 4.5kW of cooling in a versatile package. A full range of options and voltage variants are available to customize the K4 unit.
IES Tech Sales Partners with Innovent Technologies
IES Tech Sales is excited to announce a new partnership with Innovent Technologies, LLC, a specialized contract manufacturer known for their excellence in assembling and testing semiconductor manufacturing tools and equipment. This collaboration marks a significant milestone in providing enhanced services and high-quality products to clients in various industries, such as Semiconductors, Optics, Medical, Life Science, Nanotechnology, and R&D.
