Measuring Vacuum Pressures
A vacuum exists when there is negative pressure, or when there is system pressure that is less than atmospheric pressure. Manufacturing processes generate different levels of vacuum when operating at peak efficiency for a given vacuum application that are measured using a vacuum gauge. Absolute vacuum is the absence of all matter. Atmospheric pressure, also known as barometric pressure, is the pressure due to earth’s atmosphere. Atmospheric pressure is 760 Torr or 14.696 psia at sea level and changes with altitude. The vacuum pressure scale is book-ended by absolute vacuum pressure in the “ultra-high” vacuum range and atmospheric pressure at the “rough” vacuum range. It should be noted that absolute vacuum, or perfect vacuum, is never truly attained.
Most users know that vacuum is commonly measured using units of pressure. There are a few different systems of pressure measurement, and this blog will discuss those most used. In Armand Berman’s book, Total Pressure Measurements in Vacuum Technology, pressure unit systems are divided into two categories: “Coherent Systems” and “Other Systems.”
Common Units of Vacuum
“Coherent Systems” of units are based on the definition of pressure (P) as the force (F) exerted on a chamber wall per unit area (A). P = F/A. The International System of Units, or SI units, is commonly used for pressure measurement. http://physics.nist.gov/cuu/Units/units.html The SI unit for pressure is the Pascal (Pa), and it is interesting to note that NIST (National Institute of Standards and Technology) published papers are always required to use SI units. Again, the SI unit for pressure (force per unit area) is the Pascal. 1 Pa = 1 N /m2.
As a unit of pressure, the Pascal is not always convenient to use because vacuum systems often operate in pressure ranges where collected data results in large numbers. For example, near atmospheric pressure, we would measure approximately 100,000 Pa. So, a more convenient unit, the bar, was developed. (1 bar = 100,000 Pa)
Moving lower in pressure, it is very helpful to then use the mbar (1 mbar = 0.001 bar), which has become the predominate unit of measure in Europe, as the basis for describing pressure levels. As a specific example, look at the base pressure specification of a turbo pump, which will typically be given in terms of mbar (e.g., Base Pressure < 1 x 10-10 mbar).
“Other Systems” of units include the Torricelli system, which is based on an experiment (shown in the diagram below) conducted by the Italian scientist, Evangelista Torricelli. In this experiment, the pressure exerted on the mercury can be shown to be P = hdg, where h is the height of the mercury column, d is the density, and g is the acceleration due to gravity.
By measuring the mercury column height, the pressure can be determined. The Torr unit (named after Torricelli) has been defined as 1 millimeter of mercury (1 Torr = 1 mmHg). This unit, as well as the use of the mTorr unit (1 mTorr = 0.001 Torr), is commonly used in the United States. Historically, pressure was sometimes described in terms of “microns”, which simply meant a mercury column height of one micron (1x10-6 m). Note that the micron and the mTorr are the same.
Lastly, it should be noted that occasional confusion arises between the use of different, but seemingly similar, units of pressure. As explained above, the mbar and the mTorr are not the same. One mbar has the same order of magnitude as one Torr (1 mbar = 0.75 Torr).
Unit Conversions
The table below gives some conversion values between various commonly used units of pressure and vacuum. A useful website for conversions:
Pa | mbar | Torr | mTorr (micron) | Atm | |
1 Pa = | 1 | 0.01 | 0.0075 | 7.50 | ~ 10-5 |
1 mbar = | 100 | 1 | -.75 | 750.06 | ~ 10-3 |
1 Torr = | 133.3 | 1.333 | 1 | 1000.0 | ~ 10-3 |
1 mTorr (micron) = | 0.1333 | 0.00133 | 0.001 | 1 | ~ 10-6 |
1 Atm = | 101,325 | 1013.25 | 760 | 760,000 | 1 |
What is a vacuum system?
A vacuum system can consist of multiple a vacuum pumps and vacuum gauges attached to a tank that is designed to measure below atmospheric pressure. The vacuum pumps reduce the air pressure inside of the tank to the pressure range that the vacuum pump is rated for. Different vacuum pumps bring the vacuum pressure to different levels depending on the strength of the vacuum pump.
Attached to the tank is usually at least one vacuum pressure gauge. An application may require another type of vacuum gauge to measure a different pressure point. An example of this would be using a piezo pressure gauge and a Pirani pressure gauge to have a larger range of the vacuum pressure measured. A piezo vacuum gauge would be used to measure the rough vacuum range around atmosphere and the Pirani could be used to measure below 1 Torr in the mTorr range. There are vacuum gauges that use technologies from different vacuum gauges to create a combination vacuum gauge to measure vacuum pressure across a wider pressure range. Teledyne Hastings combines both the Pirani and piezo technologies to make the HVG-2020B vacuum pressure gauge.
The original article can be found on Teledyne Hastings website here.
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