GENCOA's OPTIX for ALD Processes
Optix is a multi-purpose and highly robust instrument for gas sensing in any vacuum environment. Optix caters for most industrial vacuum production processes without any requirement for a differential pumping system, providing automatic operation and real-time species detection.
KEY FEATURES OF THE OPTIX
1. Partial pressure measurement of vacuum gases
2. Wide pressure range, operating directly at process pressures from 0.5 to 10-7mbar
3. No filaments and low maintenance
4. Chemically-tolerant with dedicated version for ALD processes
5. Automatic operation during pump-down andswitch off during venting
6. Powerful, easy-to-use software with High Dynamic Range mode for enhanced sensitivity
ROBUST, COMPACT VACUUM DIAGNOSTICS AND CONTROL
Gencoa Optix is a compact gas sensor that provides robust, fast measurement of gaseous species within your vacuum process environment. Optix uses an optical detection method that operates over a wide pressure range (0.5–10-7 mbar) without filaments and without the need for differential pumping.
The pulse of the Optix detector can be synchronized with the pulsing ALD valve for precise detection and optimization of the delivery cycle. Real-time monitoring of byproduct release and precursor consumption delivers maximum control. Optix advanced spectral information provides valuable data for ALD process monitoring.
ALD PROCESS MONITORING AND CONTROL
Optix is the ideal tool to perform key ALD process monitoring and control tasks that will improve process performance and reliability:
• Measurement of vacuum quality prior to process start, leak detection and contamination detection.
• Diagnostics of precursor delivery
• Analysis of ALD reaction dynamics
• Optimization and control of ALD cycle and purge times
POWERFUL, EASY-TO-USE SOFTWARE
Advanced Windows software provides clear visualisation of the process condition, and offers powerful tools for recording and referencing complete process data. Up to 20 gases can be monitored simultaneously, with update speeds as fast as 10ms.
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IES Technical Sales is a partner of GENCOA and can help with all your ALD and semiconductor requirements. Contact us today to start a project.