Advancing Precision in Plasma Enhanced ALD: The Role of the Hiden EQP Series
In materials science, precision in thin film deposition processes like Plasma Enhanced Atomic Layer Deposition (PEALD) is paramount. The ability to control film thickness and composition with high accuracy depends significantly on understanding and controlling the plasma used in the deposition process. Here, the Hiden EQP Series emerges as an essential tool for in-depth plasma analysis, offering unparalleled insights into the components critical to deposition outcomes.
The Hiden EQP Series: A Closer Look at Its Capabilities
The EQP Series is engineered to provide detailed mass and energy analysis, capable of detecting ions, radicals, and neutrals. This capability is crucial for PEALD, where the chemical composition and energy distribution within the plasma directly affect the deposition quality and material properties of the thin films.
Precision Analysis for PEALD Optimisation
In PEALD processes, the fine-tuning of plasma parameters is essential for achieving uniform deposition and high-quality film properties. The EQP Series facilitates this by allowing real-time, in situ analysis of the plasma. This capability enables researchers to optimize process parameters more effectively, leading to improved efficiency and outcome predictability in deposition processes.
Impact of the EQP Series on PEALD Process Understanding
The application of the Hiden EQP Series in PEALD has led to enhanced process understanding and optimization. Although specific case studies are confidential, it is widely reported that the use of the EQP Series has resulted in significant advancements in deposition process control, efficiency, and material quality, across various applications including electronics and energy storage technologies.
The Future of PEALD with the Hiden EQP Series
As PEALD continues to evolve, the analytical capabilities of the Hiden EQP Series remain at the forefront of enabling innovations in thin-film deposition technology. Its precise analysis supports the development of new materials and applications, reinforcing its position as a critical tool in the field of material science.
About Hiden EQP Series
The Hiden EQP Series are advanced plasma diagnostic tools with combined high transmission ion energy analyser and quadrupole mass spectrometer, acquiring both mass spectra at specified ion energies and ion energy distributions of selected plasma ions. The EQP series includes a range of quadrupole mass spectrometers with a choice of mass range and performance for a variety of plasma applications.
EQP Systems are offered with a range of standard plasma sampling options to provide a non invasive sampling interface for a broad range of plasma applications including:
- ECR - Electron Cyclotron Resonance
- HIPIMS
- Magnetron Discharge
- Helicon Source
- DC Glow Discharge Plasma
- Pulsed Plasma & Laser Ablation
- Parallel Plate - RF Plasma
- ICP - Inductively Coupled Plasma
Watch the video about Hiden's EQP Series
The original article can be found on Hiden's website.
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