Maintaining a cluster tool can be difficult. As an example take an 8 port configuration with 7 process modules and a loadlock. In more cases is most definitely a challenge.
Why is that?
The reasons are usually as follows:
- A desire to make maximum use of the floor space
- The need for fixed piping for the process gasses
- The use of a rigid mainframe without adequate service access
What can be done about it?
Process technology is clearly the top priority. Substrate handling is of secondary importance. This line of reasoning already dictates the solution: Using a flexible, central robot Wafer Handling Module that allows access for maintenance work simply by removing a loadlock module – without having to disconnect the media connections.
Sounds fantastic? It is. And it gets even better:
Using a semi-automatic docking solution called adDOCK makes it very easy to uncouple and move