Bruker's Dektak Pro Stylus Profilometer
Building on 55 years of surface measurement innovation and technology leadership, Dektak Pro™ sets a new standard for stylus profilometer performance. The system uniquely delivers the highest quality data with unrivaled ease of use.
Bruker's Dektak systems have led the industry in stylus profiling technology for decades, achieving milestone improvements in resolution, stability, speed, and versatility. Now, Dektak systems are well-established as the gold standard of stylus profilers; when an accurate, trustworthy stylus profiler is needed, Dektak has long been the unquestioned solution.
Dektak Pro takes the next step forward in stylus profiling innovation, providing even more enhanced operability, reliability, and measurement accuracy to enhance and extend the qualities that make Dektak synonymous with stylus profiling.
Bruker's Dektak Pro Maximizes Repeatability and Accuracy
Dektak Pro delivers accurate, precise data with the highest resolution, lowest noise floor, and easiest tip exchange of any commercially available stylus profilometer. State-of-the art measurement and analysis technology maximizes repeatability and accuracy, making single-nanometer step height measurements and better than 4 Å repeatability possible.
Enhancing Throughput with Bruke'rs Dektak Pro
Every step of the measurement and analysis process is accelerated with Dektak Pro. Direct-drive scan stage technology reduces time between scans, and 64-bit parallel processing in the Vision64® software enables fast data processing.
- A new algorithm brings nearly the entire field of view into focus in the optical live image, making it easier to locate features of interest.
- New step height algorithms automate analysis routines, improve consistency, and minimize potential user error in step height calculations.
Selecting the Configuration that Best Matches Your Application and Budget
Dektak Pro comes in several standard configurations with different stage sizes — up to 200 mm of full-sample access for wafers — and automated stage options to fit your unique needs and budget.
- Dektak Pro E or -S: Manual 100 mm XY stage with or without manual theta rotation
- Dektak Pro A: Automated 150 mm XY stage with automated 360° theta
- Dektak Pro A200: Automated encoded 200 mm XY stage with fine encoded automated 360° theta
Fast and easy stylus replacement
Dektak Pro’s unique self-aligning stylus assembly facilitates quick and easy stylus exchange while eliminating any potential mishaps during the process. Bruker offers the widest range of stylus sizes to accommodate nearly any application requirement.
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