Hiden Analytical HPR-30 Series
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The Hiden HPR-30 Series are residual gas analysis systems configured for analysis of gases and vapours in vacuum processes and for vacuum diagnostics with sampling capability from high vacuum to atmospheric pressure. The systems are fully configurable for individual process applications such as CVD, ALD, plasma etching, MOCVD, process gas purity and in-process contaminant monitoring.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Versatile configurable vacuum process sampling systems
- Mass range options 200, 300, 500 or 1000 amu
- Leak detection
- Process trend analysis
- Contamination monitoring
- Technical Sheet: