Hiden Analytical TPD Workstation
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The Hiden TPD Workstation features a multiport UHV chamber with heated sample stage coupled to a high precision triple filter analyser with digital pulse ion counting detector for ultimate sensitivity and time resolution.
PERFORMANCE & SPECIFICATIONS
- Benefits
- 3F PIC Mass Spectrometer for fast data acquisition (>500 data points per second)
- Multiport UHV chamber for attachment of additional instrumentation (e.g. Ellipsometry)
- Linear sample transfer mechanism and loadlock, including gate valve and viewport
- Heated sample stage to 1000 °C
- Bakeout Jacket (200 °C max)
- Technical Sheet: