If you are depositing dielctric layers using RF and DC (or AC) power simultaneously, you run the great risk of damaging your DC supply and/or creating interference problems. A well designed and constructed “Blocking Filter” will prevent these issues from occurring.
Here is an example:
The filter enables the low-frequency DC to pass to your sputter source while blocking the high-frequency RF from migrating back into the DC portion of your power delivery set-up.
IES Technical Sales is a high technology manufacturers representative and distribution firm serving the northeast U.S., specializing in vacuum & thin film, flow & pressure, thermal and related metrology applications.