Kashiyama SDE Series

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Kashiyama SDE Series

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The Kashiyama® SDE Dry Vacuum Pump series is a durable, long lasting dry vacuum pump for any process application. The SDE is a large dry vacuum pump allowing for increased wafer and FPD substrate sizes. SDE Series are used for harsh duty and lock applications.

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PERFORMANCE & SPECIFICATIONS

Benefits
- Pumping speed ranging from 1300-100000 [L/min]
- High corrosion resistance from structural materials and temperature control
- 3Phase AC200-220V Supply Voltage

Technical Sheets
- SDE Dry Vacuum Pump

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Grouped product items
PART NUMBER	Max. Pumping Speed [L/min]*1	Ultimate Pressure [Pa]*1	Supply Voltage (50/60Hz)	Power Consumption [kW]*2	REQUEST FOR QUOTE
SDE90X	Max. Pumping Speed [L/min]1 1300.0 Ultimate Pressure [Pa]1 1.3 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 1.30 See more SDE90X*	1300.0	1.3	3Phase AC200～220V, 380～480V	1.30
SDE120TX	Max. Pumping Speed [L/min]1 1500.0 Ultimate Pressure [Pa]1 1.3 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 2.80 See more SDE120TX*	1500.0	1.3	3Phase AC200～220V, 380～480V	2.80
SDE200	Max. Pumping Speed [L/min]1 3300.0 Ultimate Pressure [Pa]1 1.3 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 2.70 See more SDE200*	3300.0	1.3	3Phase AC200～220V, 380～480V	2.70
SDE303X	Max. Pumping Speed [L/min]1 5000.0 Ultimate Pressure [Pa]1 0.5 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 1.50 See more SDE303X*	5000.0	0.5	3Phase AC200～220V, 380～480V	1.50
SDE603X	Max. Pumping Speed [L/min]1 10000.0 Ultimate Pressure [Pa]1 0.5 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 1.60 See more SDE603X*	10000.0	0.5	3Phase AC200～220V, 380～480V	1.60
SDE1203TX	Max. Pumping Speed [L/min]1 20000.0 Ultimate Pressure [Pa]1 0.5 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 3.20 See more SDE1203TX*	20000.0	0.5	3Phase AC200～220V, 380～480V	3.20
SDE30N20	Max. Pumping Speed [L/min]1 50000.0 Ultimate Pressure [Pa]1 0.5 Supply Voltage (50/60Hz) 3Phase AC200～220V, 380～480V Power Consumption [kW]2 3.30 See more SDE30N20*	50000.0	0.5	3Phase AC200～220V, 380～480V	3.30