Ultra Low Vibration TG-ML Series
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The TG-M Series uses magnetically suspended bearings allowing for a completely oil-free exhaust, any orientation installation, and longer cycles between maintenance. The product lineup offers models from 300 L/s to 3400 L/s.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Less than 1nm(o-p) measured by Radial & axial acceleration
- Advanced vibration cancellation algorithm eliminates the unwanted vibration amplitude resulted from the constant acceleration of the fast speed rotor
- Coupled with external dampers, Super Ultra Low at less than 0.1 nm(o-p) can be realized with the TG-ML Series
- Applications:
- Ultra high resolution electron microscopy, Analytical instruments, R&Ds
- E-Beam lithography, EUV, XPS, CD linewidth tool, SEM/TEM
- Technical Sheet: