Ultra High Vacuum Type TG-MU Series
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The TG-M Series uses magnetically suspended bearings allowing for a completely oil-free exhaust, any orientation installation, and longer cycles between maintenance. The product lineup offers models from 300 L/s to 3400 L/s.
PERFORMANCE & SPECIFICATIONS
- Benefits
- For ALL UHV Applications
- The TG-MU Series is designed to efficiently evacuate light gases from High Vacuum down to Ultra High Vacuum region by reducing the materials' out gassing and improving the efficiency of the Hydrogen compression
- Ultimate Vacuum can be realized 10-9 Pa order ( in the 10-11 Torr) region within a short bake - out period
- Applications:
- Analytical instruments, surface analysis and UHV R&Ds
- UHV Semiconductor thin film process and MEMs R&Ds
- Energy research, accelerators, nuclear fusion
- Technical Sheet: