TG60F
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The TG-F Series uses grease lubricated ball bearings for a pump that is small, lightweight, and low cost. The shock resistant design enables the turbo molecular pump to be mounted on moving equipment or moving parts. The product lineup offers models from 50 L/s to 2400 L/s.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Any orientation
- Compact Size
- Energy-saving
- Quick start up, and shut down with gas vent
- Durable strcture for air inrush
- High cinoressuib ratio
- Built-in controller type
- Certified safety standard NTRL/SEMI-S2/CE (for TG60F-20)
- Applications:
- Manufacturing of semiconductor, FPD, electronic parts, and other
- Analysis & examination device
- Research and Development
- Technical Sheet: