TG5000/TG5003
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The TG series uses oil-lubricated ball bearings. Chemical-use models are available in every class from 200 L/s to 5500 L/s for use in applications for exhausting corrosive gases.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Corrosive resistant type for corrosive gases
- The world's largest volume flow rate compound molecular pump
- Durable strcture for air inrush
- Sturdy, resists external impacts
- Applications:
- Semiconductor production
- FPD manufacturing
- Research and Development
- Technical Sheet: