Energy Efficient Heated Type TG-MI Series
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The TG-MI series is designed to reduce the condensation rate of build-up inside Turbo molecular pump (TMP). Osaka's patented thermal insulation structure with Temperature management system (TMS) made effective.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Combining the heat generated by the fast speed TMP rotor and built-in TMS(Temperature Management System), temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time ＆ elongated MTBS(mean time between service)
- Our patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the TMP where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up
- Improved pump life cycle ＆ reduced frequency of pump maintenance requirement - Increased system uptime
- Applications:
- Semiconductor processes, LCD/TFT/MEMs manufacturing
- Technical Sheet: