Adenso Wafer Handling Robot
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The Adenso WHR WaferHandling.Robot is the heart of our modular VAC.ROBOTICS platform. The Adenso.WHR undertakes tasks for handling sensitive and large substrates in vacuum robotics (industrial VacBot) and is optimised for maximum load capacity and large ranges. The simple arm geometry allows small gate valves and compact handling rotation areas.
PERFORMANCE & SPECIFICATIONS
- Benefits
- RANGE: Largest traversing distances – maximum flexibility
- PAYLOAD: Maximum loading capacity – unlimited substrate selection
- GATE VALVE: Intelligent kinematics – smallest gate valve
- FOOTPRINT: Space-saving kinematics – smallest installation space
- COMPLEXITY: Keep it simple with Adenso – save space and money!
- Technical Sheets