MLL ManualLoadLock.Modules
Can't find your size or material?
Need a higher quantity price?
Let us customize your order.
The Adenso WHR WaferHandling.Robot is the heart of our modular VAC.ROBOTICS platform. The Adenso.WHR undertakes tasks for handling sensitive and large substrates in vacuum robotics (industrial VacBot) and is optimised for maximum load capacity and large ranges. The simple arm geometry allows small gate valves and compact handling rotation areas.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Also usable as a BUFFER.Module
- Optionally with adHEAT heating and cooling options and special adVAC pressure control
- Technical Sheets