adHEAT
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Numerous processes, such as in SiC technology (silicon carbide), require high process temperatures (> 1,000°C). Untempered substrates require a long heating time. Optimize your processes and save valuable process time with adHEAT. Our HEATING/COOLING.modules can be easily docked onto the Adenso VAC.ROBOTICS platform and are ready for immediate use.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Simple integration in the Adenso VAC.ROBOTICS platform
- Process optimisation through time savings
- COOLING.Module: Cooling of substrates after thermal processes
- HEATING.Module: Heating of substrates as process preparation
- adHEAT.1kC enables substrates or carriers to be preheated to the required temperature of up to 1,000°C
- Process control by the Adenso cluster Software.Solution adControl