The AS-Master system can process wafers up to 200 mm diameter at temperature up to 1450°C for the high temperature version. The cross lamp furnace with multi zone control insures enhanced temperature uniformity. Different furnace configurations are available depending on the application. Pyrometer and thermocouple temperature measurements are standard features. The fast digital PID temperature controller provides accurate thermal control across the temperature range. The AS-Master can receive a temperature controlled double quartz window and sample rotation to perform RTCVD processes. Loadlock and cassette to cassette loading are optional features.