Annealsys Jipelec JetLight
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The JetLight is a compact table top two-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to 2-inch diameter. Optional susceptors are available to hold small samples and to process substrates with low infrared absorption. The quartz tube process chamber with stainless steel flanges and tubular infrared halogen lamps furnace allows running processes up to 1000°C. The horizontal motion door with quartz tray provides easy access for loading and unloading of the wafers and thermocouple installation.
PERFORMANCE & SPECIFICATIONS
- Key Features
- Software-controlled (PLC and PC)
- Hot-Wall (quartz tube) chamber design
- 2 gas lines with manual ball flow meter control
- Substrate size up to 50mm diameter
- Quartz tubes substrate holder
- Atmospheric and vacuum process capabilities
- Miscroprocessor-based thyristor technology
- Characteristics
- Quartz tube chamber
- 6 IR lamps heating system with tangential fan cooling
- Water-cooled reflector and flanges
- 16kW heating power and 3x400V+N+Gnd supply
- Temperature from ambiant to 1000°C
- Ramp rate from 1°C/sec to 50°C/sec
- Digital PID temperature control through TC K type