Annealsys AS-Micro
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The AS-Micro is a three-inch rapid thermal processor with vacuum capability dedicated to research applications. It can process substrates from few square millimeters up to 3-inch diameter or square. Optional susceptors are available to hold small samples and to process substrates with low infrared absorption. The quartz tube process chamber with stainless steel flanges and tubular infrared halogen lamps furnace allows running processes up to 1250°C with very fast ramp rates (> 250°C/s). The state of the art temperature controller provides accurate temperature control.
PERFORMANCE & SPECIFICATIONS
- Specifications
- Substrate Size: Up to 3-inch diameter or 3"x3" Small substrates using susceptors
- Process Chamber: Quartz tube with water cooled stainless steel flanges Optional twin chamber version to avoid cross contamination
- Vapors, and Gas
- Up to 5 process gas lines with digital mass flow controllers. One purge gas line with vacuum valve and vacuum gauge
- Control
- Full PC control, up to 100 steps per recipe Human interface designed in respect of SEMI E95-0200 Full data logging and process historicals
- Temperature Range
- From room temperature up to 1250°C