PVA TePla IoN 100 Plasma System
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The PVA TePla IoN 100 is a barrel plasma reactor designed for R&D and production applications. The technology is based on the proven reactor designs developed over the course of 50+ years by International Plasma Corporation, Branson ICP, Dionex, Gasonics, Metroline, TePla and finally PVA TePla. IoN 100 uses a larger chassis that provides all the gas and power connections.
PERFORMANCE & SPECIFICATIONS
- Benefits:
- Plug and play self installation
- Flexible electrodes
- Industrial cpmture with LCD touch panel and keyboard
- Windows based operating system
- Graphical User Interface (GUI) software complies
- CFR Title 21 Part 11 and Semi E95-1101
- Multi-level user access
- Specifications:
- Software
- Recipe editor for fast and versatile step controls
- Onboard diagnostic features and alarm logging
- Remote process monitoring via Ethernet
- Online web based simulation/training/support
- Pump power outlet on the chassis
- Energy saving feature - pump control