Advanced Energy DC and Pulsed-DC Solvix

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The Advanced Energy Solvix® DC and pulsed-DC power supplies for sputtering applications offer precise accuracy and proven repeatability thanks to more than a decade in the field. With a wide range of power and frequency levels, pulsing, and multiple communications options, Solvix power supplies provide a rugged and cost-effective solution for your unique process.

PERFORMANCE & SPECIFICATIONS

  • Benefits
    • DC and pulsed-DC units 
    • Outstanding arc handling
    • Current, power, and voltage regulation modes
    • Air and water cooling 
    • Multiple units configurable for varying high power requirements 


Output (K)
Output
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Input Voltage (v)
Input Voltage
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Cable Type
cable type
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Lead Type
Lead Type
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Grouped product items
PART NUMBER Output (K) Input Voltage (v) Cable Type Lead Type REQUEST FOR QUOTE
3152072-000

Output (K) 3

Input Voltage (v) 400

Cable Type Digital Analog Interface

Lead Type MTO

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3152072-001

Output (K) 3

Input Voltage (v) 400

Cable Type Profibus

Lead Type MTO

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3152072-017

Output (K) 3

Input Voltage (v) 400

Cable Type Profibus

Lead Type QTO

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3152072-002

Output (K) 5

Input Voltage (v) 400

Cable Type Digital Analog Interface

Lead Type NFM

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3152072-003

Output (K) 5

Input Voltage (v) 400

Cable Type Profibus

Lead Type NFM

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3152072-018

Output (K) 5

Input Voltage (v) 400

Cable Type Profibus

Lead Type QTO

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3152072-004

Output (K) 10

Input Voltage (v) 400

Cable Type Digital Analog Interface

Lead Type MTO

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3152072-005

Output (K) 10

Input Voltage (v) 400

Cable Type Profibus

Lead Type MTO

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3152072-011

Output (K) 10

Input Voltage (v) 400

Cable Type Profibus

Lead Type NFM

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3152072-006

Output (K) 20

Input Voltage (v) 400

Cable Type Digital Analog Interface

Lead Type QTO

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3152072-007

Output (K) 20

Input Voltage (v) 400

Cable Type Profibus

Lead Type NFM

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3152072-019

Output (K) 20

Input Voltage (v) 400

Cable Type Profibus

Lead Type MTO

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3152072-036

Output (K) 30

Input Voltage (v) 10000

Cable Type Digital Analog Interface

Lead Type MTO

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3152072-038

Output (K) 30

Input Voltage (v) 10000

Cable Type Profibus

Lead Type NFM

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3152072-039

Output (K) 30

Input Voltage (v) 10000

Cable Type Ethercat

Lead Type QTO

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3152072-040

Output (K) 30

Input Voltage (v) 10000

Cable Type Digital Analog Interface

Lead Type NFM

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3152072-041

Output (K) 3

Input Voltage (v) 400

Cable Type Ethercat

Lead Type MTO

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3152072-014

Output (K) 10

Input Voltage (v) 400

Cable Type Profibus

Lead Type MTO

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