Advanced Energy Ascent DMS

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Advanced Energy Ascent DMS

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The Advanced Energy Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation.

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PERFORMANCE & SPECIFICATIONS

Benefits

Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron
Advanced process management through a tiered approach to arc mitigation
CEX (phase synchronization)

Technical Sheets
- Ascent DMS Series

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Grouped product items
PART NUMBER	Output (k)	Input Voltage (v)	I/O Card Left	I/O Card Right	Lead Type	REQUEST FOR QUOTE
31520415-500	Output (k) 15 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right PEII emulation user port (replaces standard 37-pin user port) Lead Type MTO See more 31520415-500	15	400	No Card	PEII emulation user port (replaces standard 37-pin user port)	MTO
31520415-501	Output (k) 15 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right No Card Lead Type MTO See more 31520415-501	15	400	No Card	No Card	MTO
31520415-502	Output (k) 15 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right PEII emulation user port (replaces standard 37-pin user port) Lead Type MTO See more 31520415-502	15	400	No Card	PEII emulation user port (replaces standard 37-pin user port)	MTO
31520415-503	Output (k) 15 Input Voltage (v) 400 I/O Card Left Profibus I/O Card Right 37-pin 24V isolated user I/O card Lead Type MTO See more 31520415-503	15	400	Profibus	37-pin 24V isolated user I/O card	MTO
31520415-504	Output (k) 15 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right No Card Lead Type MTO See more 31520415-504	15	400	No Card	No Card	MTO
31520415-505	Output (k) 15 Input Voltage (v) 400 I/O Card Left Profibus I/O Card Right No Card Lead Type MTO See more 31520415-505	15	400	Profibus	No Card	MTO
31520415-592	Output (k) 15 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right PEII emulation user port (replaces standard 37-pin user port) Lead Type MTO See more 31520415-592	15	400	No Card	PEII emulation user port (replaces standard 37-pin user port)	MTO
31520430-500	Output (k) 30 Input Voltage (v) 400 I/O Card Left Profibus I/O Card Right 37-pin 24V isolated user I/O card Lead Type MTO See more 31520430-500	30	400	Profibus	37-pin 24V isolated user I/O card	MTO
31520430-501	Output (k) 30 Input Voltage (v) 400 I/O Card Left Profibus I/O Card Right No Card Lead Type MTO See more 31520430-501	30	400	Profibus	No Card	MTO
31520430-502	Output (k) 30 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right 37-pin 24V isolated user I/O card Lead Type MTO See more 31520430-502	30	400	No Card	37-pin 24V isolated user I/O card	MTO
31520430-503	Output (k) 30 Input Voltage (v) 400 I/O Card Left No Card I/O Card Right No Card Lead Type MTO See more 31520430-503	30	400	No Card	No Card	MTO
31520430-800	Output (k) 30 Input Voltage (v) 440-480 I/O Card Left Profibus I/O Card Right No Card Lead Type MTO See more 31520430-800	30	440-480	Profibus	No Card	MTO
31520430-801	Output (k) 30 Input Voltage (v) 440-480 I/O Card Left Profibus I/O Card Right 37-pin 24V isolated user I/O card Lead Type MTO See more 31520430-801	30	440-480	Profibus	37-pin 24V isolated user I/O card	MTO

Advanced Energy Ascent DMS

Advanced Energy Ascent DMS

PERFORMANCE & SPECIFICATIONS

Advanced Energy Ascent DMS

Advanced Energy Ascent DMS