Advanced Energy Apex
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The versatile Advanced Energy Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
PERFORMANCE & SPECIFICATIONS
- Benefits
- High-power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
- Technical Sheets
Output (k)
Lead Type
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