Gencoa Active Anode
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The Gencoa Active Anodes are connected to earth and use the magnetic trapping and gas injection to both guide the electrons and for gas activation. Like any electrical circuit, a plasma requires a means of returning the electron current to an anode to maintain stability and uniformity.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Lower temperature deposition – 100% of plasma electrons collected by AA in DC discharges for 25% lower substrate heating
- AA in switching square wave dual cathode arrangements results in 30% heat reduction compared to AC power mode with AA
- Better uniformity – the electrons have a linear uniform earth return with no drift during target life
- Lower defects – the active anode reduces arcs and hence defects as a result of better plasma stability
- H gher film density – the AA produces enhanced ion bombardment of the substrate for denser films
- Harder Films - eg AA doubles the hardness of sputtered carbon coatings on glass to 25 Gpa
- Lower stress – films deposited with the AA and pulsed or AC power modes present much reduced internal stress and the substrate bombardment cycles between positive and negative
- Low resistivity ITO layers as a result of the lower damage plasma – reduction of sputter voltage when anode is biased positively
- Technical Sheets