Telemark 750 Ion Source

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The 750 Ion Source is a gridless End-Hall that have been specially developed to provide a cost effective solution for ion assisted vacuum processes from small to large sized deposition systems. The sources provide an extremely reliable and maintenance-free up to 3kW source for many applications in PVD processes. The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.

PERFORMANCE & SPECIFICATIONS

  • Benefits
    • Source Diameter: 63mm diameter by 64mm long (2.48” x 2.53”)
    • Source Weight: 1.4 kgs (approx. 3 lbs)
    • Beam Power: Anode volts selectable to 225 volts; anode power 750W
    • Anode Current: Maximum 5 amps under manual or automatic beam control
    • Beam Divergence: Wide beam divergence in excess of 80 degrees
    • Gas Flow: Approximately 7sccm argon required to produce 2 amps (typical)
    • Cooling Water: Minimum 2.3 liters/minute. Water flow is constantly monitored
    • Power Unit Dimensions: 135mm x 480mm x 406mm
    • Power Unit Weight: 28 kgs (60lbs)