Advanced Energy Sekidenko MXE
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The Advanced Energy Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well-suited for dynamic processes, including laser-based processing or rapid anneals. The remarkably compact MXE is easily integrated. Its flexible control options support a variety of I/O protocols.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Improves temperature measurement accuracy for critical processes
- Enhanced repeatability and minimizes variation
- Increases productivity, yield, and throughput
- Increases stability and reliability across multiple chambers and substrate materials
- Features
- In-situ, non-contact temperature measurement employing lensed optical sensors or sapphire light pipe sensors
- High-speed measurement ideal for a variety of applications
- EtherCAT®, USB, and RS-232 output option
- Variety of temperature and reflectance wavelengths
- Technical Sheets