AS-568 FFKM Kalrez 8575 O-Ring
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DuPont™ Kalrez® 8575 perfluoroelastomer parts are a white product for “select” etching, ashing/stripping and deposition process applications. It offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties. Kalrez® 8575 has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lid seals, slit valve door seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure Post-Cleaning and Packaging is standard for all parts made from Kalrez® 8575.
PERFORMANCE & SPECIFICATIONS
DuPont™ Kalrez® 8575 perfluoroelastomer parts are a white product for “select” etching, ashing/stripping and deposition process applications. It offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties. Kalrez® 8575 has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lid seals, slit valve door seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Ultrapure Post-Cleaning and Packaging is standard for all parts made from Kalrez® 8575.
- Performance
- Temperature Range (F) -15 to 572
- “Select” etching, ashing/stripping and deposition process applications
- Offers low weight loss in Oxygen and Fluorine-Based Plasmas, low outgassing and excellent elastic recovery properties
- Excellent vacuum and long-term sealing performance
- Not Compatible Withs
- Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
- Perfluorinated lubricants (PFPE)
- Material Datasheets
| PART NUMBER | Fits Flange Size | O-Ring Size (AS-568) | Inner Diameter (In.) | Cross Section (In.) | Material | Ships Within | PRICE | ADD TO CART |
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