Hiden Analytical IMP-EPD
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The Hiden IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions from the ion beam etch process. The system includes integrated software with process specific algorithms developed for optimum process control.
PERFORMANCE & SPECIFICATIONS
- Benefits
- High sensitivity SIMS/MS with pulse ion counting detector
- Triple filter quadrupole, 300 amu mass range is standard
- Stability (less than ±0.5% height variation over 24 h)
- MASsoft control via RS232, RS485, or Ethernet LAN
- Technical Sheet: