Hiden Analytical IG20
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The Hiden IG20 features a high brightness electron impact gas ion source which is designed specifically for oxygen capability but is also suitable for use with inert and other gases.
PERFORMANCE & SPECIFICATIONS
- Benefits
- Intense ion beam with 100 µm spot size and energies from 0.5 - 5 keV
- High current density, up to 4.5mA/cm2
- Electron impact ion source with argon and oxygen capability
- 3° offset in the ion gun column for optimum rejection of neutrals
- Technical Sheet: